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The nature of structural changes of nanosecond laser modification inside silicon is investigated. Raman spectroscopy and transmission electron microscopy measurements of cross sections of the modified channels reveal highly localized crystal deformation. Raman spectroscopy measurements prove the existence of amorphous silicon inside nanosecond laser induced modifications, and the percentage of amorphous silicon is calculated based on the Raman spectrum. For the first time, the high-resolution transmission electron microscopy images directly show the appearance of amorphous silicon inside nanosecond laser induced modifications, which corroborates the indirect measurements from Raman spectroscopy. The laser modified channel consists of a small amount of amorphous silicon embedded in a disturbed crystal structure accompanied by strain. This finding may explain the origin of the positive refractive index change associated with the written channels that may serve as optical waveguides. 

The development of thin-film photovoltaics has emerged as a promising solution to the global energy crisis within the field of solar cell technology. However, transitioning from laboratory scale to large-area solar cells requires precise and high-quality scribes to achieve the required voltage and reduce ohmic losses. Laser scribing has shown great potential in preserving efficiency by minimizing the drop in geometrical fill factor, resistive losses, and shunt formation. However, due to the laser induced photothermal effects, various defects can initiate and impact the quality of scribed grooves and weaken the module’s efficiency. In this regard, much research has been conducted to analyze the geometrical fill factor, surface integrity, and electrical performance of the laser scribes to reach higher power conversion efficiencies. This comprehensive review of laser scribing of photovoltaic solar thin films pivots on scribe quality and analyzes the critical factors and challenges affecting the efficiency and reliability of the scribing process. This review also covers the latest developments in using laser systems, parameters, and techniques for patterning various types of solar thin films to identify the optimized laser ablation condition. Furthermore, potential research directions for future investigations at improving the quality and performance of thin film laser scribing are suggested. 

The concept for fabrication of waveguides by an in‐volume laser direct writing in single‐crystal silicon is explored using a nanosecond pulse laser. The key innovation of this technology relies on the generation of amorphous silicon, which has a higher refractive index than that of crystalline silicon. Herein, transmission electron microscopy (TEM) together with selected area electron diffraction (SAED) and high‐resolution TEM (HRTEM) characterizations are used to better understand the microstructural evolutions. TEM images reveal the core‐shell structures, while SAED patterns and HRTEM directly observe the presence of amorphous silicon in the core surrounded by a crystalline silicon shell. With a lower laser scanning speed, a higher density of defects yet less amorphous silicon is formed by laser direct writing.